江苏微导纳米科技股份有限公司

Atomic Layer Deposition (ALD) as the core
Chemical Vapor Deposition (CVD) and other vacuum thin-film technologies are being developed.

Atomic Layer Deposition (ALD) technology:

High-quality thin film deposition on complex shapes with controlled atomic layer accuracy.

Have：

Three-dimensional conformability, widely applicable to different shapes of substrates.

Uniformity of film formation over large areas with dense, pinhole-free films

Sub-nanometer film thickness control

Precise control of nanostacking and atomic doping ratios

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R&D Innovation

20%

R&D investment/revenue

56200

㎡

Production and R&D bases

3000

Proprietary technology (item)

35%

Percentage of R&D staff

Core Technical Team

Professional Team

Industry authority with decades of ALD+CVD application development experience

Process Development

The team has extensive experience in process development and has developed and applied dozens of materials such as oxides, nitrides, metals, and so on.

Specialized ALD manufacturers

Professional ALD

Specialized in ALD process and application scenarios, covering semiconductor, new display, new energy and other industries

Professional Solutions

Specialized and customized solutions for different customer needs

Domestic leading forward-looking application customization

Forward-looking applications

Proficient in the application of ALD foresight to meet the needs of our customers for a wide range of advanced products.

Custom development

Proficient in ALD process and application scenarios, customized development of mass production process and equipment for customers.

The only full-scene demo equipment line in China

Full Scene Demo

Experienced in full-scenario demos, providing full solution support for customers

Mass production experience

Proven in mass production and repeat orders in logic, storage, compound semiconductors, etc.

Intellectual Innovation

We implement lean production management, build an intelligent manufacturing collaboration platform (MES for short), and adopt Smart Lable and other intelligent factory logistics systems to realize production plan scheduling, real-time analysis of production progress, effective allocation of production resources, and product quality and safety traceability, etc., to further shorten the purchasing cycle, improve production efficiency, and reduce operating costs, and to empower innovation and development with digital and intelligent manufacturing.

Semiconductor equipment planning capacity

Total Area≈5000㎡，Three phases in total
Annual production capacity: 140 sets

Planned capacity of photovoltaic equipment

Total area≈20000㎡
production capacity：ALD Mainframe + Automation，40tower
Diffusion/Poly/Annealed/ALD/Tube P，60tower

Service Innovation

We have always adhered to the customer-centric service concept, leveraging the advantages of local suppliers to provide customers with tailored full-service, and continue to help customers optimize system performance, reduce costs, and quickly respond to market demand.

Provision of specialized/customized tools

1/7

Warranty period 365 days * 24 hours technical support

2/7

Immediate response to client needs, major queries within 2 hours to give a solution, within 24 hours to arrive at the scene to deal with

3/7

Client-side spare parts warehouse, 100% stocking of critical/perishable parts, non-standard parts on-site <36 hours

4/7

After the end of the warranty, on-site assistance to the customer equipment inspection 2 times a year, the software life-long free upgrade

5/7

The project has a full-time engineer tracking service, professional and dedicated

6/7

Long-term preservation of drawings, 20 years supply of spare parts, to solve the worry

7/7