CN
Product Technology
Industrialization Application Center
iOptomic Series Atomic Layer Deposition Systems
iOptomic series atomic layer deposition system adopts micro-conducting nanometer design plasma source, reaction chamber design, combined with advanced ALD coating deposition technology, can be for wafers, glass, plastics and other shaped substrate surface deposition of conformal and uniform film, with professional film system design to achieve the optical performance of different products. The system is equipped with the functions of carrier table rotation, static/dynamic compatibility, plasma, etc. It is suitable for the industrialized mass production of various types of optical cameras, AR/VR optical lenses and precision optical components.
Sales Email
iacsale@leadmicro.com
Product Features
Superior plasma control system for flexible compatibility with Thermal ALD and PEALD processes
1
The multi-zone heating system ensures the uniformity and stability of the reaction temperature, realizing uniform, high-quality films deposited at low temperatures
2
Precise preparation of TiO₂, SiO₂, Al₂O₃ and other optical films, precise control of optical parameters and thickness of each layer
3
AR products: With post-processing, ultra-low reflectivity <0.1% (visible light 420~680nm band) can be realized
4
High loading capacity: customize the carrier according to the product to improve efficiency and reduce production cost
5